Transducer-Plates

Customized solutions for assembly in process tanks made of stainless steel and plastic

Transducer plates made of Aluminium or Stainless steel for assembling at the bottom or the side wall of a tank. Transducer plates with PFA-coating are offered. These plates are available for substrate sizes of 4", 6", 8" or 12“.
According to the application the HF power of the generator can be programmed in time ramps of 2, 4, 6 or 8 seconds to drive each single Piezo transducer element or the complete transducer array. This allows to achieve a pulsed sound wave through the entire tank or alternatively a complete active sound field.

Application:
Cleaning of Substrates and Semiconductor-Wafers with 100 mm, 150 mm, 200 mm and 300 mm in Single- or Dual-Carrier.