The megasonic nebulizer and its generator have been specially developed for industrial nebulization in various electronic manufacturing areas. The transducer in the megasonic nebulizer generates a high-frequency sound wave. This sound wave is transmitted to a liquid to produce small droplets (nebulization). Precise liquid atomization enables the distribution of chemicals on semiconductor wafers, flat panels, solar cells, etc.

Megasonic nebulizer system 3MHz / 35W

Drop size: approx. 3 µm
Atomization volume: approx. 140 - 300 ml/h (valid for use with water)
Media supply: 2 openings Ø 4 mm

In contrast to compressed air atomization technology using nozzles, ultrasonic atomizers can be seen as a useful alternative in many areas of application. With ultrasonic atomizers, it is possible to atomize liquid throughputs of up to 20I per hour into a fine mist.

SONOSYS ultrasonic atomizers are suitable for atomizing solid-free liquids with a dynamic viscosity of approx. 20–50 mPas for the following applications:

• Air humidification
• Goods humidification
• Gasification and degassing of liquids
• Addition of separating agents
• Liquid addition during stirring and mixing processes
• Medical technology (e.g. direct breathing air humidification)
• Atomization of disinfectants

Ultrasound atomizer type US1 / 100 kHz / 8 W
Flow rate: 0.1–1 l/h
Most common drop size (water): Ø 20 µm

Ultrasound atomizer type  US2 / 58 kHz / 8 W
Flow rate: 0,2–2 l/h
Most common drop size (water): Ø 30 µm

Ultrasound atomizer type  US10 / 45 kHz / 8 W
Flow rate: 1–10 l/h
Most common drop size (water): Ø 35 µm

Ultrasound atomizer type  US20 / 45 kHz / 8 W
Flow rate: 2–20 l/h
Most common drop size (water): Ø 38 µm