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Hightech for cleaning of smallest particles
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Parts2clean 2025
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Efficient megasonic cleaning of micro- and nanostructures. That is our competency! In close partnerships with research institutes and our customers, we combine our existing strengths and implement them to create the best possible cleaning solution - in line with SONOSYS®'s motto: “Mastering NanoClean together.” The result is the world's most compact Megasonic generators and transducers in a unique design. SONOSYS® masters the manufacture of high-frequency ultrasonic systems in the range from 400kHz to 9MHz like no other company. The main areas of application are wafer cleaning (semiconductors), microsystem technology/MEMS cleaning, ligation technology, and optics—you can find further areas of application here.
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Discover our strengths
Mastering Nanoclean Together
The most important goal of SONOSYS® is always to offer customers maximum benefit. SONOSYS® tailors its services with unrivaled precision to the problems and requirements of its customers. For SONOSYS®, constantly changing needs and technical conditions mean continuous improvement in performance.
The most important goal of SONOSYS® is always to offer customers maximum benefit. SONOSYS® tailors its services with unrivaled precision to the problems and requirements of its customers. For SONOSYS®, constantly changing needs and technical conditions mean continuous improvement in performance.
Megasonic cleaning
As Europe's leading supplier of ultrasonic and megasonic cleaning systems in the frequency range between 400kHz and 5MHz, SONOSYS® has many years of experience and expertise in the development, production, and distribution of innovative technologies. Its main markets are semiconductors, microsystems technology, solar/PV, and optics.
As Europe's leading supplier of ultrasonic and megasonic cleaning systems in the frequency range between 400kHz and 5MHz, SONOSYS® has many years of experience and expertise in the development, production, and distribution of innovative technologies. Its main markets are semiconductors, microsystems technology, solar/PV, and optics.
Test first, then decide
We offer demo systems for rent for testing at your site. This allows you to see the advantages of the mega sound devices for yourself in advance and verify their suitability for your application. If you have any further questions or would like to book a system, please submit a request using the button below.
We offer demo systems for rent for testing at your site. This allows you to see the advantages of the mega sound devices for yourself in advance and verify their suitability for your application. If you have any further questions or would like to book a system, please submit a request using the button below.
TOP 5 in Germany
SONOSYS is one of Germany's “TOP 5 Semiconductor Tech Companies”
Top 5 semiconductor company
In the December 2022 issue, SONOSYS was named one of the “Top 5 Semiconductor Companies” in Germany.
Read more
The article “A Trailblazer in Ultrasonic and Megasonic Cleaning” deals with the historical development of SONOSYS into an established provider of megasonic solutions for single and batch wafer applications. The article is available for download here or can be read live on the Semiconductorreview.com website. The TOP 5 list can be found here, and you can browse through the online magazine here.
Customer testimonials
Authentic testimonials from our customers
“With our special requirements for the use of high-performance ultrasound in the food industry, we have always found SONOSYS® to be a competent partner. The products impress with innovative solutions and the highest quality, and we value the excellent cooperation with SONOSYS® as a development partner for forward-looking applications.”
Chair of Fluid Mechanics, Friedrich-Alexander University Erlangen-Nuremberg
“We advise customers on various wet process solutions (e.g., in the field of MEMS or microsystem technology). With our special requirements and cleaning tasks, we have always found SONOSYS® and its flexible solutions to be a competent partner.”
Sales Manager, Hilpert electronics AG
“The mega-sound nozzles used in AP[&]S cleaning systems guarantee stable process control and high cleaning efficiency in a wide variety of wet processes. Before making a purchase decision, process control can be verified at any time with SONOSYS nozzles and AP[&]S equipment by means of a live process demonstration at the AP[&]S Demo Center.”
Team Leader Process Engineering [&] Laboratory AP[&]S International GmbH
“SONOSYS has been our supplier of mega sound equipment for many years. The products are first-class, and any problems are dealt with promptly and a solution found. We are extremely satisfied.”
“We have integrated Sonosys Ultrasonic products into our lithography processing tools for many years and we have great confidence in Sonosys’ products”
„Mit SONOSYS® haben wir einen zuverlässigen Partner für Megaschall-Lösungen an der Hand, welche wir vorzugsweise in unsere Anlagen integrieren.“
