Megasonic Nozzle Systems

Megasonic nozzle systems – precision and efficiency for your cleaning processes

Our mega-scale nozzles deliver unparalleled cleaning power for sensitive surfaces and complex structures. Through the precise combination of high-frequency sound waves and water jet technology, mega-scale nozzles offer a highly efficient, material-friendly cleaning solution. Ideal for applications in electronics, semiconductor and surface technology where absolute cleanliness is required. Trust in megasonic nozzles and experience the highest levels of cleanliness without residues—for optimal results in every industry!

The right nozzle for every application

The transducer in the megasonic nozzle generates a megasonic wave that is transmitted to a substrate surface via a flowing medium (e.g. DI water). The megasonic energy is concentrated on a narrow point of 2mm or 4mm. SONOSYS® megasonic nozzles are available in frequencies of 600kHz / 1MHz / 2MHz / 3MHz / 4MHz / 5MHz and 9MHz. The higher the frequency, the gentler the cleaning and the smaller the particle areas that can be cleaned.
To achieve a larger effective range, different frequencies can be combined in a double or triple nozzle. For example, a double nozzle with 1MHz + 3MHz covers a larger area than a single nozzle with 1MHz alone.

Possible applications

Cleaning of single wafers, lithography masks, LCDs, substrates, and microcomponents (MEMS), as well as coarser particles at 600kHz in the optical industry, medical technology, and sensor technology.

Our single/double nozzle in the demo system

See video

Single nozzle

With a single nozzle, a frequency is directed onto the substrate surface via a media jet. We offer nozzles in the following frequencies: 600kHz / 1MHz / 2MHz / 3MHz / 4MHz / 5MHz and 9MHz. As a rule of thumb, the higher the frequency, the gentler the cleaning and the finer the particles that can be removed.

Our single nozzles consist of the following components and materials that come into contact with the medium:

Housing (PTFE or PCTFE or stainless steel)
Transducer plate (quartz glass or stainless steel)
O-ring (FFKM)
Nozzle tip (quartz glass or stainless steel)

Power

The maximum power output of the nozzles is approx. 270W/cm² (generator power 100%, 35W module).
The generators can be set between 10% and 100%; lower values are also possible at maximum power output on customer request.

Double nozzle

With a double nozzle, two combinable frequencies are directed simultaneously via two media jets precisely onto a point on the substrate surface. We offer the following frequencies: 600kHz / 1MHz / 2MHz / 3MHz / 4MHz / 5MHz and 9MHz; all frequency variants can be combined, for example: 1MHz+3MHz or 5MHz+9MHz. The frequency combination allows a wider range of particle sizes to be removed.

Our double nozzles consist of the following components and materials that come into contact with the medium:

Housing (PTFE or PCTFE or stainless steel)
Transducer plate (quartz glass or stainless steel)
O-ring (FFKM)
Nozzle tip (quartz glass or stainless steel)

Power

The maximum power output of the nozzles is approx. 270W/cm² (generator power 100%, 35W module).
The generators can be set between 10% and 100%; lower values are also possible at maximum power output on customer request.

Triple nozzle

With a triple nozzle, three combinable frequencies are directed simultaneously—via three media jets—precisely onto a point on the substrate surface. We offer the following frequencies: 600kHz / 1MHz / 2MHz / 3MHz / 4MHz / 5MHz and 9MHz; all frequency variants can be combined, for example 1MHz+3MHz+5MHz or 1MHz+1MHz+3MHz.

Our triple nozzles consist of the following components and materials that come into contact with the medium:

Housing (PTFE or PCTFE or stainless steel)
Transducer plate (quartz glass or stainless steel)
O-ring (FFKM)
Nozzle tip (quartz glass or stainless steel)

Power

The maximum power output of the nozzles is approx. 270W/cm² (generator power 100%, 35W module).
The generators can be set between 10% and 100%; lower values are also possible at maximum power output on customer request.

Shower nozzle

Frequency 1MHz

The transducer in the shower nozzle generates a megasonic wave that is transmitted to a substrate surface via a flowing medium (e.g. DI water). The megasonic energy is concentrated on a narrow strip 1.8mm wide and 44, 118, 405, 670mm long or a customer-specific dimension.

This megasonic shower nozzle system enables contactless cleaning of even the most sensitive surfaces with a cleaning medium that is always particle-free.