Megasonic Atomizer

For any application which requires a precise liquid spray

The Megasonic Generator and the Megasonic Atomizer (transducer) have been specially developed for use in industrial
atomization in different electronic manufacturing applications. The transducer in the Megasonic Atomizer generates a high frequency sound wave. This sound wave is transmitted to a liquid to produce small drops (atomized). A precise liquid spray enables the dispensing of chemicals onto semiconductor wafers, flat panel displays and solar cells, etc.

 

Megasonic Atomizer System 3 MHz / 35 W

Media Drop Diameter: Approx. 3 µm
Atomized liquid amount: Approx. 140 - 300 ml/h (For the use with medium water)
Liquid Supply: 2 holes Ø 4 mm


Megasonic Atomizer System 800 kHz / 70 W

Atomized liquid amount: Approx. 140 - 300 ml/h (For the use with medium water)
Liquid Supply: 4 holes Ø 4 mm

 

Ultrasonic Atomizer

To atomize liquid flow rates of up to 20 l per hour into a fine mist

On the contrary to compressed air Atomizer technology by means of injectors, Ultrasonic Atomizers may be considered as a sensible alternative in many areas of application. With Ultrasonic Atomizers it is possible to atomize liquid flow rates of up to 20 l per hour into a fine mist.


SONOSYS Ultrasonic Atomizers are generally appropriate for the atomization of liquids free of solids until a dynamic iscosity of up to approx. 20-50mPa·s for

  • air humidification
  • humidification of goods
  • gassing and degassing of liquids
  • atomizing of release agents
  • addition of liquids during stirring and mixing processes
  • medical technology (i. e. direct humidification of respiratory air)

 

Ultrasonic Atomizer System Typ US1 / 100 kHz / 8 W

Flow Rate: 0,1–1 l/h
Most Frequent Drop (Water): Ø 20 µm

Ultrasonic Atomizer System Typ US2 / 58 kHz / 8 W

Flow Rate: 0,2–2 l/h
Most Frequent Drop (Water): Ø 30 µm

 

Ultrasonic Atomizer System Typ US10 / 45 kHz / 8 W

Flow Rate: 0,1–10 l/h
Most Frequent Drop (Water): Ø 35 µm

 

Ultrasonic Atomizer System Typ US20 / 45 kHz / 20 W

Flow Rate: 0,2–20 l/h
Most Frequent Drop (Water): Ø 38 µm